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Marta P. Ferreira

affiliation not provided to SSRN

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Tuning the Characteristics of Al2o3 Thin Films Using Different Pulse Configurations: Mid-Frequency, High-Power Impulse Magnetron Sputtering, and Their Combination

Number of pages: 37 Posted: 13 Mar 2023
Marta P. Ferreira, D. Martínez-Martínez, J-B. Chemin and P. Choquet
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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alumina, coating, High-power impulse magnetron sputtering (HIPIMS), mid-frequency magnetron sputtering (MF-MS), Plasma emission monitoring, reactive sputtering, refractive index