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Fabiana Magalhães Teixeira Mendes

National Institute of Technology

Jamshedpur

  • National Institute of Technology

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Influence of Substrate Temperature on Microstructure of Zirconium Silicon Nitride Thin Films Deposited by Reactive Magnetron Sputtering

Number of pages: 15 Posted: 24 Mar 2023
Fabio Santos de Oliveira, Iago Lemos Dias, Paula Larissa Lima Araújo, Daniel Angel Ramirez, Pedro Cardoso da Silva Neto, Roberto Hubler, Fabiana Magalhães Teixeira Mendes, Igor Zumba Damasceno and Eduardo Kirinus Tentardini
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Federal University of Bahia (UFBA), affiliation not provided to SSRN, National Institute of Technology, affiliation not provided to SSRN and affiliation not provided to SSRN
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Thin films, Solid solution, Substrate heating, ZrN, Si3N4, reactive magnetron sputtering.