Tingting Chen

Southwest Jiaotong University

No. 111, Sec. North 1, Er-Huan Rd.

Chengdu

Chengdu, 610031

China

  • Southwest Jiaotong University

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Scholarly Papers (1)

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Roles of Overlapped Scratching in Grating Fabrications by Friction-Induced Selective Etching

Number of pages: 24 Posted: 31 Mar 2023
Wang He, Yu Lin, Licong Cui, Tingting Chen, Linmao Qian and Bingjun Yu
Southwest Jiaotong University, Southwest Jiaotong University, Southwest Jiaotong University, Southwest Jiaotong University, Southwest Jiaotong University and Southwest Jiaotong University
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Abstract:

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Overlapped scratches, Amorphous layer, Variable line space, Friction-induced selective etching, Gratings, silicon