Jinpeng Tian

Shenzhen Technology University

Shenzhen

China

  • Shenzhen Technology University

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Scholarly Papers (1)

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Effect of Pecvd Deposited Sio2 Interlayer on the Performance of Asic Integrated Anisotropic Magnetoresistance Sensors

Number of pages: 11 Posted: 03 Apr 2023
Yuan Jia, Jinpeng Tian, Zhixing Zhang, Wenyu Hou, Zhe Wang, Guangshuai Yang, Shunpu Li, Qiuming Song, Xueying Zhang, Yulong Chen, Zhijian Lv and Wenwei Zhang
Shenzhen Technology University, Shenzhen Technology University, Shenzhen Technology University, Shenzhen Technology University, Shenzhen Technology University, Shenzhen Technology University, Shenzhen University of Technology, Shenzhen Technology University, Shenzhen Technology University, Shenzhen Technology University, Shenzhen Technology University and Shenzhen Technology University
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Abstract:

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anisotropic magnetoresistance, ASIC incorporated sensor, TaN buffer, SiO2 deposition