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DEY Benjamin
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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Investigations of the Growth Mechanisms of Anatase Tio2 Thin Films Deposited by Pulsed Electron Cyclotron Wave Resonance Plasma at Low Substrate Temperature
Number of pages: 26
Posted: 07 Apr 2023
DEY Benjamin,
Simon Bulou
,
Nathalie Valle
,
Mireille Richard-Plouet
,
GRANIER Agnès
and
P. Choquet
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, Luxembourg Institute of Science and Technology (LIST) - Materials Research and Technology Department, University of Nantes,
affiliation not provided to SSRN
and
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Abstract:
PECVD, TiO2, pulsed plasma, photocatalytic coating, low temperature
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