Yao Wang

affiliation not provided to SSRN

No Address Available

SCHOLARLY PAPERS

1

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31

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0

Scholarly Papers (1)

1.

Effect of Sputtering Process Parameters on the Uniformity of Copper Film Deposited in Micro-Via

Number of pages: 29 Posted: 25 Apr 2023
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 31 (1,028,255)

Abstract:

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Copper film, magnetron sputtering, Micro-via, Uniformity, Interconnection technology