Grégoire Defoort

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Ultra-Low Energy Ar+ Micro-Polisher for Ion Beam Processing: From Fundamental Understanding to Process Optimisation

Number of pages: 29 Posted: 02 May 2023

Patrick Philipp, Grégoire Defoort, Alan Bahm and Tom Wirtz

affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Luxembourg Institute of Science and Technology (LIST)

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