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Pei Qiu

Southern University of Science and Technology

No 1088, xueyuan Rd.

Xili, Nanshan District

Shenzhen, 518055

China

  • Southern University of Science and Technology

SCHOLARLY PAPERS

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Scholarly Papers (1)

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Materials Removal Mechanism of Single Crystalline Sic with Laser-Induced Periodic Surface Structures (Lipss)

Number of pages: 34 Posted: 09 May 2023
Pei Chen, Zhuangzhuang Chi, Rui Pan, Fei Qin, Pei Qiu, Jiaxu Huang and Shaolin Xu
Beijing University of Technology, Beijing University of Technology, Beijing University of Technology, Beijing University of Technology, Southern University of Science and Technology, Southern University of Science and Technology and Southern University of Science and Technology
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Abstract:

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4H-SiC, material removal, femtosecond laser, Laser modification