default author photo

Yi Chen

Shanghai University

149 Yanchang Road

SHANGDA ROAD 99

Shanghai 200072, 200444

China

  • Shanghai University

SCHOLARLY PAPERS

1

DOWNLOADS

42

TOTAL CITATIONS

0

Scholarly Papers (1)

Actions:
Email selected abstracts
1.

Effect of Edta-Modified Alumina Composite Abrasive on The Cmp Performance of Sapphire Substrate

Number of pages: 33 Posted: 18 May 2023
Wei Zhang, Hong Lei, Wenqing Liu, Zefang Zhang, Yi Chen, Xiaogang Hu and Xiangshan Ye
Shanghai University, Shanghai University, Shanghai University - Institute of Materials, Shanghai University of Engineering Science, Shanghai University, Shanghai University and University of Shanghai for Science and Technology
Downloads 42 (1,222,651)

Abstract:

Loading...

Chemical mechanical polishing, Alumina composite abrasive, Ethylenediamine tetraacetic acid, Graft modification