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Narayana Y.V

affiliation not provided to SSRN

SCHOLARLY PAPERS

1

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42

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1

Scholarly Papers (1)

1.

Area Dependent Capacitive Accelerometer and Air Gap Dependent Capacitive Accelerometer Design and Non-Linearity Analysis for High Frequency Applications

Number of pages: 18 Posted: 23 May 2023
Annamalai University, Annamalai University and affiliation not provided to SSRN
Downloads 42 (1,170,409)
Citation 1

Abstract:

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Area changed capacitive accelerometer, Air gap changed capacitive accelerometer, Bulk micromachining, MEMS