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Sanjay Nayak
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Hipims-Grown Aln Buffer for Threading Dislocation Reduction in Dc-Magnetron Sputtered Gan Epifilm on Sapphire Substrate
Number of pages: 20
Posted: 02 Jun 2023
Jui-Che Chang
,
Han-Hui Tseng
,
Ying-Lin Lo
, Sanjay Nayak,
Daniel Lundin
,
Per O.Å. Persson
,
Ray-Hua Horng
,
Lars Hultman
,
Jens Birch
and
Ching-Lien Hsiao
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, Linkoping University - Department of Physics, Chemistry and Biology, Linkoping University - Thin Film Physics Division, National Chiao Tung University, Linkoping University - Thin Film Physics Division, Linkoping University - Thin Film Physics Division and
affiliation not provided to SSRN
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Abstract:
GaN, Magnetron sputtering, HiPIMS, dislocations, XRC, TEM
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