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Tao Li

North University of China

No. 3 Xueyuan Road, Taiyuan, China

taiyuan, 030051

China

SCHOLARLY PAPERS

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Scholarly Papers (1)

1.

High-Sensitivity Saw Pressure Sensor Based on Single Crystal Linbo3 Film with Silicon Cavities

Number of pages: 18 Posted: 26 Jun 2023
North University of China, North University of China, North University of China, North University of China, North University of China, North University of China, North University of China, North University of China, North University of China, North University of China - Science and Technology on Electronic Test and Measurement Laboratory and North University of China
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Abstract:

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MEMS, single-crystal LiNbO3, surface acoustic wave, pressure sensor