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Shwetank Yadav

University of Toronto

105 St George Street

Toronto, M5S 3G8

Canada

SCHOLARLY PAPERS

1

DOWNLOADS

48

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0

Scholarly Papers (1)

1.

Multiscale Simulations of Hydrochlorination on Si and Cu3si Surfaces with Applications for Polysilicon Production

Number of pages: 34 Posted: 27 Jun 2023
Shwetank Yadav and Chandra Veer Singh
University of Toronto and University of Toronto - Department of Materials Science and Engineering
Downloads 48 (1,086,013)

Abstract:

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hydrochlorination, polysilicon, trichlorosilane, Cu3Si, Siemens, kinetic Monte Carlo