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yeonghwan Ahn

Ajou University

Woncheon-dong, Yeongtong-gu

Suwon-si, Gyeonggi-do

Korea, Republic of (South Korea)

SCHOLARLY PAPERS

1

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58

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0

Scholarly Papers (1)

1.

Effects of Substrate and Annealing Conditions on Ferroelectric Properties of Non-Doped Hfo2 Deposited by Rf Plasma Sputter

Number of pages: 18 Posted: 30 Jun 2023
Seokwon Lim, yeonghwan Ahn, Kumar Mohit and Hyungtak Seo
Ajou University, Ajou University, Ajou University and Ajou University - Department of Materials Science & Engineering
Downloads 58 (980,173)

Abstract:

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Hafnium oxide, Sputtering, Orthorhombic, Substrate, Ferroelectricity