affiliation not provided to SSRN
Nanoparticles, sputtering, gas phase aggregation, nanocomposite, Nanotechnology, TEM
nanoparticles, sputtering, gas phase aggregation, nanocomposite, nanotechnology, TEM
gas phase aggregation, PECVD, nanocomposite, SiOx, FTIR, localized surface plasmon resonance