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Zhen He

Beijing Institute of Technology

5 South Zhongguancun street

Center for Energy and Environmental Policy Researc

Beijing, 100081

China

SCHOLARLY PAPERS

1

DOWNLOADS

37

TOTAL CITATIONS

0

Scholarly Papers (1)

1.

Introducing an Inclination Angle and Surface Topography to the Interaction Mechanism between Focused Ion Beam and Solids

Number of pages: 11 Posted: 15 Jul 2023
Beijing Institute of Technology, Beijing Institute of Technology, affiliation not provided to SSRN, Southern University of Science and Technology and University of Tokyo
Downloads 37 (1,222,651)

Abstract:

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Keywords: Focused ion beam, Molecular dynamics simulation, Surface topography, Inductively coupled plasma etching, Large-scale micro-fabrication, MEMS optical switch