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Inkyu Sohn

Yonsei University

Seoul

Korea, Republic of (South Korea)

  • Yonsei University

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Scholarly Papers (1)

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Thermal Atomic Layer Deposition of Ternary Ge-S-Se Alloy for Advanced Ovonic Threshold Switch Selectors in Three-Dimensional Cross-Point Memory Array

Number of pages: 29 Posted: 18 Jul 2023
Seungwon Park, Myoungsub Kim, Tae Hyun Kim, Minkyu Lee, Seunggyu Na, Inkyu Sohn, Taehoon Kim, Taeyoon Lee, Seung-min Chung and Hyungjun Kim
Yonsei University, affiliation not provided to SSRN, Yonsei University, Yonsei University, Yonsei University, Yonsei University, affiliation not provided to SSRN, Yonsei University, Yonsei University and Yonsei University
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Abstract:

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ovonic threshold switch, atomic layer deposition, selector, ALD super-cycle, Ge-S-Se, off-current