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Akinari Sugiyama
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Scholarly Papers (1)
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1.
Evaluation of Etching Performance of Single Etching Gases for High-Κ Films
Number of pages: 16
Posted: 27 Jul 2023
Anhan Liu
,
Zhan Hou
,
Fan Wu
,
Xiaowei Zhang
,
Shingo Nakamura
,
Tomomi Irita
, Akinari Sugiyama,
Takashi Nishikawa
and
He Tian
Tsinghua University, Tsinghua University, Tsinghua University, Tsinghua University,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
and Tsinghua University
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Abstract:
high-κ films, ICP, etching, BCl3
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