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Alexander A. Solovykh

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Reaction Mechanisms for Thermal N, O, and H Atoms Incident on Mos2 Monolayer

Number of pages: 22 Posted: 09 Aug 2023
Ekaterina N. Voronina, Yuri A. Mankelevich, Lev S. Novikov and Alexander A. Solovykh
Lomonosov Moscow State University, Lomonosov Moscow State University, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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Two-dimensional materials, remote plasma, Surface functionalization, Interaction mechanism, simulation, Density functional theory