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Influencing the Morphological Stability of Movpe-Grown Β-Ga2o3 Films by O2/Ga Ratio

Number of pages: 22 Posted: 16 Feb 2024 Last Revised: 13 Apr 2024

Ta-Shun Chou, Arub Ahktar, Saud Bin Anooz, Jana Rehm, Owen Ernst, Palvan Seyidov, Andreas Fiedler, Wolfram Miller, Zbigniew Galazka, Thilo Remmele, Martin Albrecht and Andreas Popp

Leibniz - Institut für Kristallzüchtung - IKZ, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Brandenburg University of Technology Cottbus-Senftenberg, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN

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Abstract:

In-Situ Spectral Reflectance Investigation of Heteroepitaxial Grown β-Ga2O3 Thin Films on c-Plane Al2O3 Via MOVPE Process

Number of pages: 19 Posted: 09 Aug 2023 Last Revised: 21 Jan 2024

Ta-Shun Chou, Saud Bin Anooz, Raimund Grüneberg, Jana Rehm, Arub Ahktar, Deshabrato Mukherjee, Peter Petrik and Andreas Popp

Leibniz - Institut für Kristallzüchtung - IKZ, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Hungarian Academy of Sciences (HAS) - Centre for Energy Research, HUN-REN Centre for Energy Research and affiliation not provided to SSRN

Downloads 53 (1,041,696)

Ta-Shun Chou

Leibniz - Institut für Kristallzüchtung - IKZ

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Scholarly Papers (2)

Influencing the Morphological Stability of Movpe-Grown Β-Ga2o3 Films by O2/Ga Ratio

Abstract:

In-Situ Spectral Reflectance Investigation of Heteroepitaxial Grown β-Ga2O3 Thin Films on c-Plane Al2O3 Via MOVPE Process

Abstract: