Liqin Liu

Chengdu University of Information Technology

No.24 Block 1, Xuefu Road, Chengdu, China

Chengdu, 610225

China

  • Chengdu University of Information Technology

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Doi: / (Please Add Manuscript Number)Fabrication and Photolithographic Properties of Teox Inorganic Photoresist for Two-Photon Laser Direct Writing

Number of pages: 18 Posted: 14 Aug 2023
Liqin Liu, Zeyu Zhao, Changtao Wang, Weiwei Jiang, Dingyu Yang, hui sun and Tixian Zeng
Chengdu University of Information Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Chengdu University of Information Technology, Chengdu University of Information Technology and China Meteorological Administration
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Abstract:

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TeOx film, inorganic photoresists, phase change, two-photon laser direct writing