Yinggong Ma

affiliation not provided to SSRN

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Influence of Growth Parameters and Systematical Analysis on 8-Inch Piezoelectric Aln Thin Films by Magnetron Sputtering

Number of pages: 13 Posted: 21 Aug 2023
Shaocheng Wu, Rongbin Xu, Bingliang Guo, Yinggong Ma and Daquan Yu
Xiamen University, Xiamen University, affiliation not provided to SSRN, affiliation not provided to SSRN and Xiamen University
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Abstract:

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AlN thin film, growth conditions, morphology, residual stress, the pseudo-Voigt function