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Tianlun Shen
Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Sub-Diffraction Limited Nanogroove Fabrication of 30 nm Features on Diamond Films Using 800 nm Femtosecond Laser Irradiation
Number of pages: 4
Posted: 06 Sep 2023
Daqi Zhang
,
Tao Chen
, Tianlun Shen,
Yu Zhang
,
Yinsong He
,
Jinhai Si
and
Xun Hou
Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education
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Abstract:
LIPSS, Femtosecond Laser, Nanofabrication, Diamond Films, Sub-Diffraction Limited
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