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Ben D. Beake

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

2

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88

TOTAL CITATIONS

0

Scholarly Papers (2)

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1.

Simulating Single Particle Impact with Randomised Impact Testing: Experiments on Fused Silica and Bk7 Glass

Number of pages: 35 Posted: 11 Sep 2023
Ben D. Beake, Stephen R. Goodes, Hannah Zhang, Luis Isern, Christine Chalk, John R. Nicholls and Mark Gee
affiliation not provided to SSRN, affiliation not provided to SSRN, National Physical Laboratory, Cranfield University, Cranfield University, Cranfield University and National Physical Laboratory
Downloads 50 (1,074,648)

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Erosion, glass, fused silica, impact, wear

2.

Enhanced Etching Resistance of Y2o3 Films Through Microstructure Control Via Thermal Annealing

Number of pages: 26 Posted: 05 Aug 2025
Shiao Wang, Qiuming Fu, Hongyang Zhao, Tomasz Liskiewicz and Ben D. Beake
Wuhan Institute of Technology, Wuhan Institute of Technology, Wuhan Institute of Technology, Manchester Metropolitan University and affiliation not provided to SSRN
Downloads 38 (1,263,436)

Abstract:

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Y2O3 thin films, plasma etching resistance, Magnetron sputtering, Thermal annealing, microstructure control, semiconductor manufacturing