Chan-Hung Lu

National Chiao Tung University

1001 University Road

Hsinchu, 1001

Taiwan

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Scholarly Papers (1)

1.

Undoped Β-Ga2o3 Layer Thickness Effect on Performance of Mosfets Grown on Sapphire Substrate

Number of pages: 12 Posted: 14 Sep 2023
National Chiao Tung University, National Chiao Tung University, National Chiao Tung University, National Chung Hsing University and National Chiao Tung University
Downloads 91 (614,109)

Abstract:

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Un-intentionally doped (UID) layers, β-Ga2O3, tetraethoxysilane (TEOS), metalorganic chemical vapor deposition