Xiaomin Xiong

affiliation not provided to SSRN

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Tool Design and Stability Study for Localized and Fixed-Point Polishing of Wafer Using Giant Electro-Rheological

Number of pages: 19 Posted: 30 Sep 2023
Haihong Ai, Kun Wang, Jiajun Lin, Xiaomin Xiong and Zhanshan Wang
affiliation not provided to SSRN, University of South Australia, affiliation not provided to SSRN, affiliation not provided to SSRN and Tongji University
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Abstract:

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Wafer, Giant electro-rheological, Localized and fixed-point polishing, tool design, Stability and feasibility