135, Far-East Rd., Chung-Li
Taoyuan, ROC
Taiwan
Yuan Ze University
Aluminum nitride, gallium nitride, glass, reactive sputtering, X-ray diffraction, X-ray photoelectron spectroscopy.
Aluminum nitride, Gallium nitride, Glass, reactive sputtering, X-ray diffraction, X-ray photoelectron spectroscopy.
Gallium nitride (GaN), aluminum nitride (AlN), radio-frequency (RF) magnetron sputtering, photoluminescence (PL) spectroscopy