Chung-Kai Chi

Yuan Ze University

135, Far-East Rd., Chung-Li

Taoyuan, ROC

Taiwan

SCHOLARLY PAPERS

3

DOWNLOADS

170

TOTAL CITATIONS

3

Scholarly Papers (3)

Studies on High Quality Gan/Aln Deposited on Glass Substrates by Radio-Frequency Reactive Sputtering

Number of pages: 23 Posted: 13 Oct 2023
Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University and Yuan Ze University
Downloads 60 (796,100)

Abstract:

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Aluminum nitride, gallium nitride, glass, reactive sputtering, X-ray diffraction, X-ray photoelectron spectroscopy.

Studies on High Quality Gan/Aln Deposited on Glass Substrates by Radio-Frequency Reactive Sputtering

Number of pages: 24 Posted: 06 Apr 2024
Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University and Yuan Ze University
Downloads 30 (1,075,953)

Abstract:

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Aluminum nitride, Gallium nitride, Glass, reactive sputtering, X-ray diffraction, X-ray photoelectron spectroscopy.

2.

Optimization of High-Quality Gallium Nitride Thin Films Deposited on Silicon Substrates with an Aluminum Nitride Buffer Layer Through Radiofrequency Magnetron Sputtering

Number of pages: 35 Posted: 15 Feb 2024
Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University and Yuan Ze University
Downloads 40 (943,065)
Citation 3

Abstract:

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Gallium nitride (GaN), aluminum nitride (AlN), radio-frequency (RF) magnetron sputtering, photoluminescence (PL) spectroscopy

3.

Optimization of High-Quality Gallium Nitride Thin Films Deposited on Silicon Substrates with an Aluminum Nitride Buffer Layer Through Radio-Frequency Magnetron Sputtering

Number of pages: 32 Posted: 23 Oct 2023
Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University, Yuan Ze University and Yuan Ze University
Downloads 40 (943,065)

Abstract:

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Gallium nitride (GaN), aluminum nitride (AlN), radio-frequency (RF) magnetron sputtering, photoluminescence (PL) spectroscopy