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Rebeca Falcão Borja de Oliveira Correia

National Institute for Space Research

Brazil

  • National Institute for Space Research

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Scholarly Papers (1)

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Preparation of Boron-Doped Diamond-Like Carbon Films Via Enhanced-Pecvd Using an Additional Cathode

Number of pages: 15 Posted: 14 Oct 2023
Elver Juan de Dios Mitma Pillaca, Rebeca Falcão Borja de Oliveira Correia, Gislene Valdete Martins, Saulo Ribeiro Ferreira, Tiago Fiorini da Silva, Cleber Lima Rodrigues and Vladimir Jesus Trava-Airoldi
affiliation not provided to SSRN, National Institute for Space Research, National Institute for Space Research, Federal University of São Paulo (UNIFESP), affiliation not provided to SSRN, affiliation not provided to SSRN and National Institute for Space Research
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Abstract:

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B:DLC, Modified PECVD, Boron doped DLC films, Trimethylborate, Additional cathode, Bubbler.