Hao Li

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Elevated Temperature Tribological Properties of A-C:Si Films Sputtered from Sic Target in the Presence of C2h2 Gas

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Elevated Temperature Tribological Properties of A-C:Si Films Sputtered from Sic Target in the Presence of C2h2 Gas

Number of pages: 30 Posted: 08 Dec 2023
Linqing Wang, Hao Li, Chunlin Pu, Li Wang and Junjun Wang
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 17 (1,244,328)

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Reactive magnetron sputtering, a-C:Si films, Testing temperatures, Tribological behaviors

Elevated Temperature Tribological Properties of A-C:Si Films Sputtered from Sic Target in the Presence of C2h2 Gas

Number of pages: 27 Posted: 02 Nov 2023
Linqing Wang, Hao Li, Chunlin Pu, Li Wang and Junjun Wang
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 15 (1,270,897)

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Reactive magnetron sputtering, a-C:Si films, Testing temperatures, Tribological behaviors