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Robin V. Nielsen

Aarhus University

Nordre Ringgade 1

DK-8000 Aarhus C, 8000

Denmark

SCHOLARLY PAPERS

1

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23

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0

Scholarly Papers (1)

1.

Squeeze Film Absolute Pressure Sensors with Sub-Millipascal Sensitivity

Number of pages: 8 Posted: 06 Jan 2024
Aarhus University, Aarhus University, Linkoping University - Department of Physics, Chemistry and Biology and Aarhus University
Downloads 23 (1,411,822)

Abstract:

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absolute pressure sensor, squeeze film, SiN membrane