Boshen Liu

Changchun University of Science and Technology

China

SCHOLARLY PAPERS

1

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29

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0

Scholarly Papers (1)

1.

Precise and Smooth Structure on Inp Fabricated by Femtosecond Laser Direct Writing-Assisted Wet Etching

Number of pages: 23 Posted: 17 Jan 2024
Changchun University of Science and Technology, Changchun University of Science and Technology, Jilin University (JLU), Changchun University of Science and Technology and Changchun University of Science and Technology
Downloads 29 (1,049,007)

Abstract:

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femtosecond laser micromachining, wet etching, InP, laser modification