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Ganatee Gitgeatpong

Phranakhon Rajabhat University

Thailand

  • Phranakhon Rajabhat University

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Structural, Morphological, and Chemical Composition of Ternary Zrhfn Thin Films Deposited by Reactive Co-Magnetron Sputtering

Number of pages: 29 Posted: 22 Jan 2024
Ganatee Gitgeatpong, Jedsada Prathumsit, Wuttichai Phae-ngam, Mati Horprathum, Narit Triamnak and Hideki Nakajima
Phranakhon Rajabhat University, Phranakhon Rajabhat University, Phranakhon Rajabhat University, National Science and Technology Development Agency (NSTDA) - National Electronics and Computer Technology Center, Silpakorn University and Synchrotron Light Research Institute
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Co-magnetron sputtering, zirconium hafnium nitride, Hardness, XPS