Taiyuan University of Technology, Taiyuan University of Technology, Taiyuan University of Technology, Taiyuan University of Technology, Taiyuan University of Technology, Taiyuan University of Technology, Taiyuan University of Technology, Shanxi Normal University, North University of China, Chinese Academy of Sciences (CAS) - Shanghai Institute of Microsystem and Information Technology, Taiyuan University of Technology - Shanxi Key Laboratory of Micro Nano Sensors & Artificial Intelligence Perception and Taiyuan University of Technology