Rudakov Grigory Aleksandrovich

Russian Academy of Sciences (RAS)

SCHOLARLY PAPERS

2

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Scholarly Papers (2)

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1.

Water Dose Influence to the Ald Hafnium Oxide Process: Simulation and Experiment

Number of pages: 43 Posted: 24 Jan 2024
Sergey Viktorovich Bulyarskiy, L’vov Pavel Evgenievich, Kristina Litvinova, Polomskikh Vitaliy Sergeevich and Rudakov Grigory Aleksandrovich
Russian Academy of Sciences (RAS), Russian Academy of Sciences (RAS), Russian Academy of Sciences (RAS), Russian Academy of Sciences (RAS) and Russian Academy of Sciences (RAS)
Downloads 43 (903,048)

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simulation of deposition process, hafnium oxide, atomic layer deposition

2.

Gas Phase Chemical Thermodynamics Calculation as a First Step for Understanding of Non-Stoichiometric HfOx Formation Mechanism in ALD

Number of pages: 27 Posted: 05 Nov 2024
Kristina Litvinova, Anastasia Shibalova, Andrei Goryachev, Rudakov Grigory Aleksandrovich and Polomskikh Vitaliy Sergeevich
Russian Academy of Sciences (RAS), Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, Russian Academy of Sciences (RAS) and Russian Academy of Sciences (RAS)
Downloads 34 (990,364)

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ALD, HfO2, TDMAH, ellipsometry, Thermodynamics