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Mingqi Si

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Dependence of Spectral Purity of Gd Plasma Emission Around 6.7 Nm on Laser Irradiation Conditions

Number of pages: 17 Posted: 04 Feb 2024
Zhilin Wen, Zhuo Xie, Chaohui Wang, Qijin Zhang, Mingqi Si, Xiaowei Song, Yinping Dou, Bochao Li and Jingquan Lin
Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology, affiliation not provided to SSRN, Changchun University of Science and Technology, Changchun University of Science and Technology, Changchun University of Science and Technology and Changchun University of Science and Technology
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Abstract:

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Laser produced plasma, 6.7nm EUV source, Spectral purity, Electron density profile, Optical depth, electron temperature