Zefang Zhang

Shanghai University of Engineering Science

shanghai, 201620

China

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The Influence of Fillers in Polyurethane Pad for Sapphire Substrate Chemical Mechanical Polishing

Downloads 57 (789,428)

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The Influence of Fillers in Polyurethane Pad for Sapphire Substrate Chemical Mechanical Polishing

Number of pages: 14 Posted: 06 Feb 2024

Yiming Meng, Xinyan An, Shanduan Zhang and Zefang Zhang

Fudan University, Shanghai University of Engineering Science, Fudan University and Shanghai University of Engineering Science

Downloads 38 (970,140)

Abstract:

The Influence of Fillers in Polyurethane Pad for Sapphire Substrate Chemical Mechanical Polishing

Number of pages: 16 Posted: 17 Mar 2024

Yiming Meng, Xinyan An, Shanduan Zhang and Zefang Zhang

Fudan University, Shanghai University of Engineering Science, Fudan University and Shanghai University of Engineering Science

Downloads 19 (1,199,938)

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