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Nikita Anatolyevich Shulaev

Tyumen State University

10 Semakov st.

Tyumen, 625003

Russia

  • Tyumen State University

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Scholarly Papers (1)

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Creation of Sms Targets, Composition of Magnetron Sputtering Films

Number of pages: 19 Posted: 20 Feb 2024
Ilya Olegovich Yurev, Maxim Molokeev, A.S. Aleksandrovsky, Alexandr Petrovich Tyutyunnik, Roza Iosifovna Gulyaeva, Aleksei Aleksandrovich Polkovnikov, Nikita Anatolyevich Shulaev, Vitaly Grigoryevich Bamburov, Andrey Vladimirovich Elyshev and O.V. Andreev
Tyumen State University, Tyumen State University, affiliation not provided to SSRN, Russian Academy of Sciences (RAS), affiliation not provided to SSRN, Tyumen State University, Tyumen State University, affiliation not provided to SSRN, Tyumen State University and Tyumen State University
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Abstract:

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samarium monosulfide, technical ceramics, magnetron sputtering