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Chen Wu

affiliation not provided to SSRN

SCHOLARLY PAPERS

2

DOWNLOADS

91

TOTAL CITATIONS

0

Scholarly Papers (2)

1.

Atomistic Analysis on Implantation Effects of Hydrogen Ions and Copper Ions into 4h-Sic

Number of pages: 26 Posted: 11 Mar 2024
affiliation not provided to SSRN, Xidian University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, University of Arkansas, Fayetteville, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 62 (961,006)

Abstract:

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Atomic and close-to-atomic scale manufacturing (ACSM), molecular dynamics, ion implantation, Lattice damage, Sputtering yield, Channeling effect

2.

Atomic-Scale Mechanism of Subsurface Damage Suppression in 4H-SiC Nano-Scratching with Hydrogen Ion Implantation

Number of pages: 32 Posted: 21 Mar 2026
Xidian University, Xidian University, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 29 (1,491,251)

Abstract:

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ion implantation, Molecular dynamics, Phase transformation, Subsurface damage, Atomic and close-to-atomic cutting