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Przemyslaw Jozwik

affiliation not provided to SSRN

SCHOLARLY PAPERS

1

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0

Scholarly Papers (1)

1.

Depth Profiling of the Si Ion Implantation Induced Disorder and Strain in 4h-Sic and the Thermal Annealing Recovery

Number of pages: 22 Posted: 26 Mar 2024
University of Delhi, affiliation not provided to SSRN, Inter-University Accelerator Centre, Inter-University Accelerator Centre, affiliation not provided to SSRN and University of Delhi
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Abstract:

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ion implantation, Silicon carbide, HRXRD, RBS, Debye-Waller factor, strain