Ga Yeon Lee

affiliation not provided to SSRN

No Address Available

SCHOLARLY PAPERS

1

DOWNLOADS

44

TOTAL CITATIONS

0

Scholarly Papers (1)

1.

Amidoxime-Containing Zr and Hf Precursors for Thin Film Deposition

Number of pages: 22 Posted: 10 May 2024
Taek-Mo Chung, Ga Yeon Lee and Chanwoo Park
affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 44 (905,092)

Abstract:

Loading...

Hafnium, Zirconium, Metal precursor, Heteroleptic, ALD precursor