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Tia Gray

Rice University

6100 South Main Street

Houston, TX 77005-1892

United States

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Benchmarking Diamond Surface Preparation and Fluorination Via Inductively Coupled Plasma-Reactive Ion Etching

Number of pages: 19 Posted: 15 May 2024
Tia Gray, Zhang Xiang, ABHIJIT BISWAS, Tanguy Terlier, Eliezer F. Oliveira, Anand B. Puthirath, Chenxi Li, Tymofii Pieshkov, Elias J. Garratt, Mahesh Raj Neupane, Bradford B. Pate, A. Glen Birdwell, Tony G. Ivanov, Robert Vajtai and Pulickel M. Ajayan
Rice University, Rice University, Rice University, Rice University, affiliation not provided to SSRN, Rice University, Rice University, Rice University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Rice University and Rice University
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diamond, reactive ion etching, fluorination, surface morphology, contact angle