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Kenji Takagi

affiliation not provided to SSRN

SCHOLARLY PAPERS

1

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0

Scholarly Papers (1)

1.

Highly C-Axis-Oriented Apatite-Type Lanthanum Silicate Thin Films Fabricated by Magnetron Sputtering Under Bias

Number of pages: 22 Posted: 21 May 2024
Denso Corporation, affiliation not provided to SSRN and Nagoya University
Downloads 13 (1,518,554)

Abstract:

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Apatite-type lanthanum silicate, c-axis orientation, Deposition density, Magnetron Sputtering