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Diamanta-Perle Silvas-Cabrales

Cinvestav-Unidad Queretaro

Libramiento Norponiente 2000

Fracc. Real De Juriquilla

Queretaro, 76100

Mexico

  • Cinvestav-Unidad Queretaro

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Xps Study of the Nitridation of Hafnia on Silicon

Number of pages: 68 Posted: 17 Jun 2024
Marisol Mayorga-Garay, Orlando Cortazar-Martinez, Jorge-Alejandro Torres-Ochoa, Diamanta-Perle Silvas-Cabrales, Felipe Corona-Davila, Dulce-Maria Guzman-Bucio, Abraham-Jorge Carmona-Carmona and Alberto Herrera-Gomez
Cinvestav-Unidad Queretaro, Cinvestav-Unidad Queretaro, Cinvestav-Unidad Queretaro, Cinvestav-Unidad Queretaro, Cinvestav-Unidad Queretaro, Cinvestav-Unidad Queretaro, affiliation not provided to SSRN and Cinvestav-Unidad Queretaro
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N2+ plasma species, MultiLayer Model, uncertainties, remote plasma