Guinier-Preston zones, Spinodal decomposition, Age hardening, Annealing
Boron film, low-temperature growth, magnetron sputtering, nanostructure, XPS, Mechanical properties
WN, Phase composition, XPS, peak fitting, chemical bonding
diboride thin films, high-temperature oxidation, Mechanical properties, HiPIMS, XPS, Nanostructure
XPS, charging, insulators, calibration, referencing, capping
Thermal Stability and Phase Separation Pathways in Tialmn (M = Hf, Ta, W) Transition-Metal Nitride Alloy Thin Films