Keyu Bao

Xidian University

Xi'an Chang'an two hundred ten National Road

Xian

China

  • Xidian University

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Direct Observation of Phase Transition in Hf0.5Zr0.5O2 Thin Films Affected by Top Electrodes During in-situ Heating TEM

Number of pages: 25 Posted: 09 Jul 2024
Qijun Yang, Siwei Dai, Changfan Ju, Keyu Bao, Binjian Zeng, Shuaizhi Zheng, Jiajia Liao, Hejun Xu, Rubin Xie, Yinquan Wang, Sirui Zhang, Min Liao and Yichun Zhou
Xidian University, Xidian University, Xiangtan University, Xidian University, Xiangtan University, Xiangtan University, Xidian University - School of Advanced Materials and Nanotechnology, National Key Laboratory of Integrated Circuits and Microsystem, National Key Laboratory of Integrated Circuits and Microsystem, National Key Laboratory of Integrated Circuits and Microsystem, Xidian University, Xidian University - School of Advanced Materials and Nanotechnology and Xidian University - School of Advanced Materials and Nanotechnology
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Hf0.5Zr0.5O2 ferroelectric thin films, in-situ STEM, phase transition, top electrode