Ziheng Gao

Shaanxi University of Science and Technology

Xi’an, 710021

China

  • Shaanxi University of Science and Technology

SCHOLARLY PAPERS

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Scholarly Papers (1)

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Study on Uniform Size and Spherical Ceo2 Abrasives Synthesized by Two-Step Method and Their Chemical Mechanical Polishing Performances

Number of pages: 17 Posted: 13 Jul 2024
Ning Xu, Yu Lin, Yuxin Luo, Jiahui Ma, Yu Huo, Kailong Gao, Ziheng Gao and Zhuo Wang
Shaanxi University of Science and Technology, Shaanxi University of Science and Technology, Shaanxi University of Science and Technology, Shaanxi University of Science and Technology, Shaanxi University of Science and Technology, Shaanxi University of Science and Technology, Shaanxi University of Science and Technology and Shaanxi University of Science and Technology
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Abstract:

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Two-step method, CeO2 abrasive, Chemical mechanical polishing (CMP), Size, Surface Roughness