Junguang Chen

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Normal Incident Reflectance Spectroscopy for Thin-Film Thickness Measurement with Genetic Algorithm

Number of pages: 17 Posted: 17 Jul 2024
Jiao Bai, Huaming Chen, Junguang Chen, Haowei Yang, Xinghui Li, Yan Shi and Jiangfeng Song
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Tsinghua University - Tsinghua-Berkeley Shenzhen Institute, affiliation not provided to SSRN and affiliation not provided to SSRN
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thin-film thicknessreflectance spectroscopygenetic algorithm