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Gaoming Zhang

China Jiliang University

No. 258, Xueyuan Street

Hangzhou City

China

  • China Jiliang University

SCHOLARLY PAPERS

2

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76

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0

Scholarly Papers (2)

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1.

A Review of Calibration Standards, Devices and Methods for Process Gas Flow

Number of pages: 17 Posted: 07 Aug 2024
Gaoming Zhang, Boxu Hui, Zhipeng XU, Bin Zhou, Bengt Sundén and Zhen Cao
China Jiliang University, China Jiliang University, China Jiliang University, China Jiliang University, Lund University and China Jiliang University
Downloads 57 (1,031,043)

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Semiconductor manufacturing, Process gases, Gas flow standards, Flow Measurement

2.

Investigation on a Reciprocating Plunger Dynamic Flow Standard Device for Periodic and Aperiodic Gas Flows

Number of pages: 12 Posted: 13 May 2026
Lei Xiang, Lan Jin, Chaoyang Chen, Hantao Wang, Rong Yu, Wenhan Liao, Jun Zhao, Yupei Zhang and Gaoming Zhang
Zhejiang Institute of Quality Sciences, Zhejiang Institute of Quality Sciences, Zhejiang Institute of Quality Sciences, Zhejiang Institute of Quality Sciences, Zhejiang Institute of Quality Sciences, Zhejiang Institute of Quality Sciences, China Jiliang University, Zhejiang Institute of Quality Sciences and China Jiliang University
Downloads 19 (1,481,165)

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Dynamic flow measurement, Flow standard device, Reciprocating plunger, AMESim simulation, Closed-loop control