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Oleksiy Penkov

Zhejiang University

38 Zheda Road

Hangzhou, 310058

China

  • Zhejiang University

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Hard Antireflection Coatings with Enhanced Mechanical Properties Based on Gradient Structure

Number of pages: 23 Posted: 08 Aug 2024
Yu-si Wang, Tingting Zheng, Pengyuan Wu, Chenying Yang, Oleksiy Penkov, Yujie Liu, Kaixin Yuan, Yan Cheng, Yueguang Zhang and Weidong Shen
Zhejiang University, Zhejiang University, Zhejiang University, affiliation not provided to SSRN, Zhejiang University, Zhejiang University, Zhejiang University, Zhejiang University, Zhejiang University and Zhejiang University
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Abstract:

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antireflection coating, Scratch resistance, Reactive sputtering, Mechanical properties