Svenja Lohmann

Uppsala University

Box 513

Uppsala, 751 20

Sweden

  • Uppsala University

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In-Situ High-Resolution Depth Profiling Using Medium Energy Ions

Number of pages: 31 Posted: 16 Aug 2024
Radek Holeňák, Dmitrii Moldarev, Eleni Ntemou, Theofanis Tsakiris, Carolin Frank, Kevin Vomschee, Svenja Lohmann and Daniel Primetzhofer
Uppsala University - Department of Physics and Astronomy, Uppsala University - Department of Physics and Astronomy, Uppsala University - Department of Physics and Astronomy, Uppsala University, University of Duisburg-Essen, University of Duisburg-Essen, Uppsala University and Uppsala University - Department of Physics and Astronomy
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Abstract:

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medium energy ion scattering, in-situ, thin film deposition, ion implantation, high-resolution depth profiling, sample preparation